Increasing productivity of backend semiconductor packaging inspection machine

Introduction

The semiconductor industry has some of the most demanding applications, a combination of extreme accuracy and precision combined with high throughput, semiconductor processing can be divided into two parts – “frontend” and “backend”. The term Backend refers to dicing the wafer into individual chips and all the processes thereafter; such as test, assembly and packaging. The goal of inline packaging inspection equipment is to provide high precision 100% analysis while maintaining high throughput.

System Requirements

The challenges of keeping up with the innovations in packaging, drastically increases. The fast-paced progress towards greater densities and finer dimensions are pushing the limits of vision systems. To meet these issues the company was looking for a complete high performance system with reliable image acquisition to perform high speed, high accuracy inline inspection. Meanwhile, the customer wanted to reduce the effort involved in installation/maintenance.

System Description

When equipment builders are designing advanced precision machining machines, choosing the right components determines how successful it can be. For this project, motion control cards, frame grabbers and camera greatly influence the system overall productivity and accuracy. Accordingly, Advantech suggested an intelligent GigE Vision frame grabber, DSP-based multi-axis motion control card and compact modularized system for direct integration in space-constrained machine to accomplish high-precision, high productivity IC packaging inspection.

The solution adopts an industrial grade computer to combine PCIE-1174, four channel intelligent GigE Vision frame grabber including a dedicated Field Programmable Gate Array (FPGA) to reconstruct images before transmitting them in real time to the host PC via DMA (Direct Memory Access). This then frees up the host PC’s processor and ensures there is no frame or packet loss during image acquisition. To further aid installation and maintenance, this series also includes the use of PoE (Power over Ethernet) and Ad Hoc protocol which, like DHCP, doesn’t require a specific IP address and enables System Integrators (SI) to simply plug in the camera and go.

As well as the PCIE-1174, which is installed in a MIC-7500 with MIC-75M13 chassis, there are another two control cards installed to help provide the client with the desired functionality.

The PCI-1245 is a four-axis servo/stepper motor control card, equipped with high-performance DSP and SoftMotion algorithm to perform the motion trajectory and timing control to meet the synchronization in a precise movement.

The PCI-1756 is a 64-ch Isolated Digital I/O PCI Card, and in this scenario is used for the digital signal path: sensor, solenoid valve, switches & indicators.

System Archite